Wafer-scale high-κ dielectrics for two-dimensional circuits via van der Waals integration

The practical application of two-dimensional (2D) semiconductors for high-performance electronics requires the integration with large-scale and high-quality dielectrics—which however have been challenging to deposit to date, owing to their dangling-bonds-free surface. Here, we report a dry dielectri...

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Detalles Bibliográficos
Autores principales: Lu, Zheyi, Chen, Yang, Dang, Weiqi, Kong, Lingan, Tao, Quanyang, Ma, Likuan, Lu, Donglin, Liu, Liting, Li, Wanying, Li, Zhiwei, Liu, Xiao, Wang, Yiliu, Duan, Xidong, Liao, Lei, Liu, Yuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10125989/
https://www.ncbi.nlm.nih.gov/pubmed/37095079
http://dx.doi.org/10.1038/s41467-023-37887-x

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