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Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum
The spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum are studied by using spectroscopy. The plume spatial distribution clearly shows two zones with different characteristics. The center of the first zone is at a distance of approximately 0.5 m...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10126117/ https://www.ncbi.nlm.nih.gov/pubmed/37095284 http://dx.doi.org/10.1038/s41598-023-33933-2 |
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author | Chen, Zhandong Ning, Hua Zhang, Xiulan |
author_facet | Chen, Zhandong Ning, Hua Zhang, Xiulan |
author_sort | Chen, Zhandong |
collection | PubMed |
description | The spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum are studied by using spectroscopy. The plume spatial distribution clearly shows two zones with different characteristics. The center of the first zone is at a distance of approximately 0.5 mm from the target. Silicon ionic radiation, recombination radiation, and bremsstrahlung mainly occur in this zone, causing an exponential decay with a decay constant of approximately 0.151–0.163 mm. The second zone with a greater area, whose center is at a distance of approximately 1.5 mm from the target, follows the first zone. In this zone, the radiation from silicon atoms and electron-atom collisions dominates, leading to an allometric decay with an allometric exponent of approximately − 1.475 to − 1.376. In the second zone, the electron density spatial distribution is approximately arrowhead-shaped, which is potentially induced by collisions between ambient molecules and the particles in front of the plume. These results indicate that both the recombination effect and expansion effect play important roles and compete with each other in plumes. The recombination effect is dominant near the silicon surface, causing exponential decay. As the distance increases, the electron density decreases exponentially by recombination, causing a more intense expansion effect. |
format | Online Article Text |
id | pubmed-10126117 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-101261172023-04-26 Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum Chen, Zhandong Ning, Hua Zhang, Xiulan Sci Rep Article The spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum are studied by using spectroscopy. The plume spatial distribution clearly shows two zones with different characteristics. The center of the first zone is at a distance of approximately 0.5 mm from the target. Silicon ionic radiation, recombination radiation, and bremsstrahlung mainly occur in this zone, causing an exponential decay with a decay constant of approximately 0.151–0.163 mm. The second zone with a greater area, whose center is at a distance of approximately 1.5 mm from the target, follows the first zone. In this zone, the radiation from silicon atoms and electron-atom collisions dominates, leading to an allometric decay with an allometric exponent of approximately − 1.475 to − 1.376. In the second zone, the electron density spatial distribution is approximately arrowhead-shaped, which is potentially induced by collisions between ambient molecules and the particles in front of the plume. These results indicate that both the recombination effect and expansion effect play important roles and compete with each other in plumes. The recombination effect is dominant near the silicon surface, causing exponential decay. As the distance increases, the electron density decreases exponentially by recombination, causing a more intense expansion effect. Nature Publishing Group UK 2023-04-24 /pmc/articles/PMC10126117/ /pubmed/37095284 http://dx.doi.org/10.1038/s41598-023-33933-2 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Chen, Zhandong Ning, Hua Zhang, Xiulan Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum |
title | Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum |
title_full | Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum |
title_fullStr | Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum |
title_full_unstemmed | Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum |
title_short | Spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum |
title_sort | spatial distribution characteristics of plumes induced by femtosecond laser ablation of silicon in vacuum |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10126117/ https://www.ncbi.nlm.nih.gov/pubmed/37095284 http://dx.doi.org/10.1038/s41598-023-33933-2 |
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