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Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we succ...

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Detalles Bibliográficos
Autores principales:	Ma, Youcao, Song, Jian, Zhao, Yuyao, Tanaka, Kiyotaka, Wu, Shijunbo, Dong, Chao, Wang, Xubo, Kanno, Isaku, Ouyang, Jun, Zhou, Jia, Liu, Yue
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10142605/ https://www.ncbi.nlm.nih.gov/pubmed/37110021 http://dx.doi.org/10.3390/ma16083185

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