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A Brief Overview of the Rapid Progress and Proposed Improvements in Gallium Nitride Epitaxy and Process for Third-Generation Semiconductors with Wide Bandgap
In this paper, we will discuss the rapid progress of third-generation semiconductors with wide bandgap, with a special focus on the gallium nitride (GaN) on silicon (Si). This architecture has high mass-production potential due to its low cost, larger size, and compatibility with CMOS-fab processes....
Autores principales: | Liu, An-Chen, Lai, Yung-Yu, Chen, Hsin-Chu, Chiu, An-Ping, Kuo, Hao-Chung |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143529/ https://www.ncbi.nlm.nih.gov/pubmed/37420998 http://dx.doi.org/10.3390/mi14040764 |
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