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Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer
This paper presents a deep neural network (DNN) based design optimization methodology for dual-axis microelectromechanical systems (MEMS) capacitive accelerometer. The proposed methodology considers the geometric design parameters and operating conditions of the MEMS accelerometer as input parameter...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143555/ https://www.ncbi.nlm.nih.gov/pubmed/37421050 http://dx.doi.org/10.3390/mi14040817 |