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Deep Learning Based Multiresponse Optimization Methodology for Dual-Axis MEMS Accelerometer

This paper presents a deep neural network (DNN) based design optimization methodology for dual-axis microelectromechanical systems (MEMS) capacitive accelerometer. The proposed methodology considers the geometric design parameters and operating conditions of the MEMS accelerometer as input parameter...

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Detalles Bibliográficos
Autores principales: Mattoo, Fahad A., Nawaz, Tahir, Saleem, Muhammad Mubasher, Khan, Umar Shahbaz, Hamza, Amir
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143555/
https://www.ncbi.nlm.nih.gov/pubmed/37421050
http://dx.doi.org/10.3390/mi14040817