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Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy

Quartz tuning forks (QTFs) are self-sensing and possess a high quality factor, allowing them to be used as probes for atomic force microscopes (AFMs) for which they offer nano-scale resolution of sample images. Since recent work has revealed that utilizing higher-order modes of QTFs can offer better...

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Detalles Bibliográficos
Autores principales: Lin, Rui, Qian, Jianqiang, Li, Yingzi, Cheng, Peng, Wang, Cheng, Li, Lei, Gao, Xiaodong, Sun, Wendong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145148/
https://www.ncbi.nlm.nih.gov/pubmed/37112263
http://dx.doi.org/10.3390/s23083923
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author Lin, Rui
Qian, Jianqiang
Li, Yingzi
Cheng, Peng
Wang, Cheng
Li, Lei
Gao, Xiaodong
Sun, Wendong
author_facet Lin, Rui
Qian, Jianqiang
Li, Yingzi
Cheng, Peng
Wang, Cheng
Li, Lei
Gao, Xiaodong
Sun, Wendong
author_sort Lin, Rui
collection PubMed
description Quartz tuning forks (QTFs) are self-sensing and possess a high quality factor, allowing them to be used as probes for atomic force microscopes (AFMs) for which they offer nano-scale resolution of sample images. Since recent work has revealed that utilizing higher-order modes of QTFs can offer better resolution of AFM images and more information on samples, it is necessary to understand the relationship between the vibration characteristics of the first two symmetric eigenmodes of quartz-based probes. In this paper, a model that combines the mechanical and electrical characteristics of the first two symmetric eigenmodes of a QTF is presented. Firstly, the relationships between the resonant frequency, amplitude, and quality factor between the first two symmetric eigenmodes are theoretically derived. Then, a finite element analysis is conducted to estimate the dynamic behaviors of the analyzed QTF. Finally, experimental tests are executed to verify the validity of the proposed model. The results indicate that the proposed model can accurately describe the dynamic properties of a QTF in the first two symmetric eigenmodes either under electrical or mechanical excitation, which will provide a reference for the description of the relationship between the electrical and mechanical responses of the QTF probe in the first two symmetric eigenmodes as well as the optimization of higher modal responses of the QTF sensor.
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spelling pubmed-101451482023-04-29 Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy Lin, Rui Qian, Jianqiang Li, Yingzi Cheng, Peng Wang, Cheng Li, Lei Gao, Xiaodong Sun, Wendong Sensors (Basel) Communication Quartz tuning forks (QTFs) are self-sensing and possess a high quality factor, allowing them to be used as probes for atomic force microscopes (AFMs) for which they offer nano-scale resolution of sample images. Since recent work has revealed that utilizing higher-order modes of QTFs can offer better resolution of AFM images and more information on samples, it is necessary to understand the relationship between the vibration characteristics of the first two symmetric eigenmodes of quartz-based probes. In this paper, a model that combines the mechanical and electrical characteristics of the first two symmetric eigenmodes of a QTF is presented. Firstly, the relationships between the resonant frequency, amplitude, and quality factor between the first two symmetric eigenmodes are theoretically derived. Then, a finite element analysis is conducted to estimate the dynamic behaviors of the analyzed QTF. Finally, experimental tests are executed to verify the validity of the proposed model. The results indicate that the proposed model can accurately describe the dynamic properties of a QTF in the first two symmetric eigenmodes either under electrical or mechanical excitation, which will provide a reference for the description of the relationship between the electrical and mechanical responses of the QTF probe in the first two symmetric eigenmodes as well as the optimization of higher modal responses of the QTF sensor. MDPI 2023-04-12 /pmc/articles/PMC10145148/ /pubmed/37112263 http://dx.doi.org/10.3390/s23083923 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Communication
Lin, Rui
Qian, Jianqiang
Li, Yingzi
Cheng, Peng
Wang, Cheng
Li, Lei
Gao, Xiaodong
Sun, Wendong
Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy
title Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy
title_full Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy
title_fullStr Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy
title_full_unstemmed Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy
title_short Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy
title_sort equivalent electromechanical model for quartz tuning fork used in atomic force microscopy
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145148/
https://www.ncbi.nlm.nih.gov/pubmed/37112263
http://dx.doi.org/10.3390/s23083923
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