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Modeling of Reactive Sputtering—History and Development

This work critically reviews the evolution of reactive sputtering modeling that has taken place over the last 50 years. The review summarizes the main features of the deposition of simple metal compound films (nitrides, oxides, oxynitrides, carbides, etc.) that were experimentally found by different...

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Detalles Bibliográficos
Autor principal: Shapovalov, Viktor I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145856/
https://www.ncbi.nlm.nih.gov/pubmed/37110092
http://dx.doi.org/10.3390/ma16083258