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Modeling of Reactive Sputtering—History and Development
This work critically reviews the evolution of reactive sputtering modeling that has taken place over the last 50 years. The review summarizes the main features of the deposition of simple metal compound films (nitrides, oxides, oxynitrides, carbides, etc.) that were experimentally found by different...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10145856/ https://www.ncbi.nlm.nih.gov/pubmed/37110092 http://dx.doi.org/10.3390/ma16083258 |