Nanoelectromechanical Infrared Spectroscopy with In Situ Separation by Thermal Desorption: NEMS-IR-TD

[Image: see text] We present a novel method for the quantitative analysis of mixtures of semivolatile chemical compounds. For the first time, thermal desorption is integrated directly with nanoelectromechanical infrared spectroscopy (NEMS-IR-TD). In this new technique, an analyte mixture is deposited via nebulization on the surface of a NEMS sensor and subsequently desorbed using heating under vacuum. The desorption process is monitored in situ via infrared spectroscopy and thermogravimetric analysis. The resulting spectro-temporal maps allow for selective identification and analysis of the mixture. In addition, the corresponding thermogravimetric data allow for analysis of the desorption dynamics of the mixture components. As a demonstration, caffeine and theobromine were selectively identified and quantified from a mixture with a detection limit of less than 6 pg (about 30 fmol). With its exceptional sensitivity, NEMS-IR-TD allows for the analysis of low abundance and complex analytes with potential applications ranging from environmental sensing to life sciences.