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Characterization and study of high conductivity antimony-doped tin oxide thin films grown by mist chemical vapor deposition

Antimony doped tin oxide thin films are grown at atmospheric pressure using a home-built mist chemical vapor deposition system, which is an environmental-friendly technique with low energy consumption. For obtaining high quality Sb:SnO(x) films, different solutions are used to support the film fabri...

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Detalles Bibliográficos
Autores principales:	Liu, Li, Ueda, Mariko, Kawaharamura, Toshiyuki
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2023
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10152926/ https://www.ncbi.nlm.nih.gov/pubmed/37143909 http://dx.doi.org/10.1039/d3ra00359k

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