Chemical and Morphological Modifications Induced by Argon Plasma Treatments on Fluorinated Polybenzoxazole Films

[Image: see text] Fluorinated photodefinable polymers are widely employed as re-distribution layers in wafer-level packaging to produce microelectronic devices because of their suitable low dielectric constant and moisture absorption, high mechanical toughness, thermal conductivity and stability, an...

Descripción completa

Detalles Bibliográficos
Autores principales: Perricelli, Francesco, Boscaglia, Massimo, Cantiano, Massimiliano, Spitaleri, Luca, Fragalà, Maria Elena, Gulino, Antonino
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10157868/
https://www.ncbi.nlm.nih.gov/pubmed/37151557
http://dx.doi.org/10.1021/acsomega.3c00952

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10157868/
https://www.ncbi.nlm.nih.gov/pubmed/37151557
http://dx.doi.org/10.1021/acsomega.3c00952

Ejemplares similares