Elastic and thermo-elastic characterizations of thin resin films using colored picosecond acoustics and spectroscopic ellipsometry

Colored Picosecond Acoustics (CPA) and Spectroscopic Ellipsometry (SE) are combined to measure elastic and thermoelastic properties of polymer thin-film resins deposited on 300 mm wafers. Film thickness and refractive index are measured using SE. Sound velocity and thickness are measured using CPA f...

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Detalles Bibliográficos
Autores principales: Devos, A., Chevreux, F., Licitra, C., Chargui, A., Chapelon, L.-L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2023
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10160771/
https://www.ncbi.nlm.nih.gov/pubmed/37152401
http://dx.doi.org/10.1016/j.pacs.2023.100498

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