Performance of Active-Quenching SPAD Array Based on the Tri-State Gates of FPGA and Packaged with Bare Chip Stacking

The performance of an active-quenching single-photon avalanche diode (SPAD) array that is based on the tri-state gates of a field programmable gate array (FPGA) is presented. The array is implemented by stacking a bare 4 × 4 N-on-P SPAD array on a bare FPGA die, and the electrodes of the SPAD pixels and the I/O ports of the FPGA are connected through wire bonding within the same package. The active quenching action on each SPAD pixel is performed by using the properties of the tri-state gates of the FPGA. Digital signal processing, such as pulse counters, data encoders, and command interactions, is also performed by using the same FPGA. The breakdown voltage of the SPAD pixels, with an active area of 60 μm × 60 μm, is 47.2–48.0 V. When the device is reverse biased at a voltage of ~50.4 V, a response delay of ~50 ns, a dead time of 157 ns, a dark count rate of 2.44 kHz, and an afterpulsing probability of 6.9% are obtained. Its peak photon detection probability (PDP) reaches 17.0% at a peak wavelength of 760 nm and remains above 10% at 900 nm. This hybrid integrated SPAD array is reconfigurable and cost effective.