Prototype Optical Bionic Microphone with a Dual-Channel Mach–Zehnder Interferometric Transducer

A prototype optical bionic microphone with a dual-channel Mach–Zehnder interferometric (MZI) transducer was designed and prepared for the first time using a silicon diaphragm made by microelectromechanical system (MEMS) technology. The MEMS diaphragm mimicked the structure of the fly Ormia Ochracea’...

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Detalles Bibliográficos
Autores principales: Liu, Xin, Cai, Chen, Ji, Kangning, Hu, Xinyu, Xiong, Linsen, Qi, Zhi-mei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181713/
https://www.ncbi.nlm.nih.gov/pubmed/37177620
http://dx.doi.org/10.3390/s23094416

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