A Distributed Supervisor Architecture for a General Wafer Production System

The current trend in the wafer production industry is to expand the production chain with more production stations, more buffers, and robots. The goal of the present paper is to develop a distributed control architecture to face this challenge by controlling wafer industrial units in a general produ...

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Detalles Bibliográficos
Autores principales: Koumboulis, Fotis N., Fragkoulis, Dimitrios G., Georgakopoulos, Panteleimon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181753/
https://www.ncbi.nlm.nih.gov/pubmed/37177749
http://dx.doi.org/10.3390/s23094545

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181753/
https://www.ncbi.nlm.nih.gov/pubmed/37177749
http://dx.doi.org/10.3390/s23094545

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