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A Distributed Supervisor Architecture for a General Wafer Production System
The current trend in the wafer production industry is to expand the production chain with more production stations, more buffers, and robots. The goal of the present paper is to develop a distributed control architecture to face this challenge by controlling wafer industrial units in a general produ...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10181753/ https://www.ncbi.nlm.nih.gov/pubmed/37177749 http://dx.doi.org/10.3390/s23094545 |