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A monolithically integrated microcantilever biosensor based on partially depleted SOI CMOS technology

This paper presents a monolithically integrated aptasensor composed of a piezoresistive microcantilever array and an on-chip signal processing circuit. Twelve microcantilevers, each of them embedded with a piezoresistor, form three sensors in a Wheatstone bridge configuration. The on-chip signal pro...

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Detalles Bibliográficos
Autores principales:	Liu, Yi, Tian, Yuan, Lin, Cong, Miao, Jiahao, Yu, Xiaomei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10188532/ https://www.ncbi.nlm.nih.gov/pubmed/37206699 http://dx.doi.org/10.1038/s41378-023-00534-y

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