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Wearable Multi-Channel Pulse Signal Acquisition System Based on Flexible MEMS Sensor Arrays with TSV Structure

Micro-electro-mechanical system (MEMS) pressure sensors play a significant role in pulse wave acquisition. However, existing MEMS pulse pressure sensors bound with a flexible substrate by gold wire are vulnerable to crush fractures, leading to sensor failure. Additionally, establishing an effective...

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Detalles Bibliográficos
Autores principales:	Kang, Xiaoxiao, Huang, Lin, Zhang, Yitao, Yun, Shichang, Jiao, Binbin, Liu, Xin, Zhang, Jun, Li, Zhiqiang, Zhang, Haiying
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10204577/ https://www.ncbi.nlm.nih.gov/pubmed/37218793 http://dx.doi.org/10.3390/biomimetics8020207

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