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Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR

This paper presents the fabrication and characterization of a biaxial MEMS (MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which incorporates a low-absorption dielectric multilayer coating, i.e., a Bragg reflector. These 2 mm square MEMS mirrors, developed on 8-inch si...

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Detalles Bibliográficos
Autores principales:	Mollard, L., Riu, J., Royo, S., Dieppedale, C., Hamelin, A., Koumela, A., Verdot, T., Frey, L., Le Rhun, G., Castellan, G., Licitra, C.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221218/ https://www.ncbi.nlm.nih.gov/pubmed/37241642 http://dx.doi.org/10.3390/mi14051019

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