Cargando…
Design and Simulation of Microbolometer with Dual Cavity for High Figure of Merits
The rapid expansion of the applications of infrared (IR) sensing in the commercial market has driven the need to develop new materials and detector designs for enhanced performance. In this work, we describe the design of a microbolometer that uses two cavities to suspend two layers (sensing and abs...
| Autores principales: | , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10221691/ https://www.ncbi.nlm.nih.gov/pubmed/37241572 http://dx.doi.org/10.3390/mi14050948 |