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Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces

Microforce plates are indispensable tools for quantitatively evaluating the behavior of small objects such as tiny insects or microdroplets. The two main measurement principles for microforce plates are: the formation of strain gauges on the beam that supports the plate and the measurement of the de...

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Autores principales: Kiriyama, Taisei, Shimazaki, Kenichiro, Nakashima, Rihachiro, Takahashi, Hidetoshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222307/
https://www.ncbi.nlm.nih.gov/pubmed/37241679
http://dx.doi.org/10.3390/mi14051056
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author Kiriyama, Taisei
Shimazaki, Kenichiro
Nakashima, Rihachiro
Takahashi, Hidetoshi
author_facet Kiriyama, Taisei
Shimazaki, Kenichiro
Nakashima, Rihachiro
Takahashi, Hidetoshi
author_sort Kiriyama, Taisei
collection PubMed
description Microforce plates are indispensable tools for quantitatively evaluating the behavior of small objects such as tiny insects or microdroplets. The two main measurement principles for microforce plates are: the formation of strain gauges on the beam that supports the plate and the measurement of the deformation of the plate using an external displacement meter. The latter method is characterized by its ease of fabrication and durability as strain concentration is not required. To enhance the sensitivity of the latter type of force plates with a planar structure, thinner plates are generally desired. However, brittle material force plates that are both thin and large and can be fabricated easily have not yet been developed. In this study, a force plate consisting of a thin glass plate with a planar spiral spring structure and a laser displacement meter placed under the plate center is proposed. The plate deforms downward when a force is exerted vertically on its surface, resulting in the determination of the applied force using Hooke’s law. The force plate structure is easily fabricated by laser processing combined with the microelectromechanical system (MEMS) process. The fabricated force plate has a radius and thickness of 10 mm and 25 µm, respectively, with four supporting spiral beams of sub-millimeter width. A fabricated force plate featuring a sub-N/m spring constant achieves a resolution of approximately 0.01 µN.
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spelling pubmed-102223072023-05-28 Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces Kiriyama, Taisei Shimazaki, Kenichiro Nakashima, Rihachiro Takahashi, Hidetoshi Micromachines (Basel) Article Microforce plates are indispensable tools for quantitatively evaluating the behavior of small objects such as tiny insects or microdroplets. The two main measurement principles for microforce plates are: the formation of strain gauges on the beam that supports the plate and the measurement of the deformation of the plate using an external displacement meter. The latter method is characterized by its ease of fabrication and durability as strain concentration is not required. To enhance the sensitivity of the latter type of force plates with a planar structure, thinner plates are generally desired. However, brittle material force plates that are both thin and large and can be fabricated easily have not yet been developed. In this study, a force plate consisting of a thin glass plate with a planar spiral spring structure and a laser displacement meter placed under the plate center is proposed. The plate deforms downward when a force is exerted vertically on its surface, resulting in the determination of the applied force using Hooke’s law. The force plate structure is easily fabricated by laser processing combined with the microelectromechanical system (MEMS) process. The fabricated force plate has a radius and thickness of 10 mm and 25 µm, respectively, with four supporting spiral beams of sub-millimeter width. A fabricated force plate featuring a sub-N/m spring constant achieves a resolution of approximately 0.01 µN. MDPI 2023-05-16 /pmc/articles/PMC10222307/ /pubmed/37241679 http://dx.doi.org/10.3390/mi14051056 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Kiriyama, Taisei
Shimazaki, Kenichiro
Nakashima, Rihachiro
Takahashi, Hidetoshi
Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
title Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
title_full Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
title_fullStr Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
title_full_unstemmed Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
title_short Thin Glass Micro Force Plate Supported by Planar Spiral Springs for Measuring Minute Forces
title_sort thin glass micro force plate supported by planar spiral springs for measuring minute forces
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222307/
https://www.ncbi.nlm.nih.gov/pubmed/37241679
http://dx.doi.org/10.3390/mi14051056
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