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Development of an Implantable Capacitive Pressure Sensor for Biomedical Applications

In this study, a subminiature implantable capacitive pressure sensor is proposed for biomedical applications. The proposed pressure sensor comprises an array of elastic silicon nitride (SiN) diaphragms formed by the application of a polysilicon (p-Si) sacrificial layer. In addition, using the p-Si l...

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Detalles Bibliográficos
Autores principales:	Roh, Ji-Hyoung, Shin, Kyu-Sik, Song, Tae-Ha, Kim, Jihong, Lee, Dae-Sung
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222820/ https://www.ncbi.nlm.nih.gov/pubmed/37241599 http://dx.doi.org/10.3390/mi14050975

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