High-Speed Temperature Control Method for MEMS Thermal Gravimetric Analyzer Based on Dual Fuzzy PID Control

The traditional thermal gravimetric analyzer (TGA) has a noticeable thermal lag effect, which restricts the heating rate, while the micro-electro-mechanical system thermal gravimetric analyzer (MEMS TGA) utilizes a resonant cantilever beam structure with high mass sensitivity, on-chip heating, and a...

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Detalles Bibliográficos
Autores principales: Zhang, Xiaoyang, Cao, Zhi, Wang, Shanlai, Yao, Lei, Yu, Haitao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222855/
https://www.ncbi.nlm.nih.gov/pubmed/37241554
http://dx.doi.org/10.3390/mi14050929

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222855/
https://www.ncbi.nlm.nih.gov/pubmed/37241554
http://dx.doi.org/10.3390/mi14050929

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