A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles

The wafer pre-aligner is a crucial component in the lithography process to correct the wafer center and notch orientation. To improve the precision and the efficiency of pre-alignment, a new method to calibrate the center and the orientation of a wafer based on the weighted Fourier series fitting of...

Descripción completa

Detalles Bibliográficos
Autores principales: Chen, Jingsong, Lan, Zhou, Xue, Cheng, Lan, Jun, Liu, Zhenghao, Yang, Yong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223695/
https://www.ncbi.nlm.nih.gov/pubmed/37241579
http://dx.doi.org/10.3390/mi14050956

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223695/
https://www.ncbi.nlm.nih.gov/pubmed/37241579
http://dx.doi.org/10.3390/mi14050956

Ejemplares similares