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A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles
The wafer pre-aligner is a crucial component in the lithography process to correct the wafer center and notch orientation. To improve the precision and the efficiency of pre-alignment, a new method to calibrate the center and the orientation of a wafer based on the weighted Fourier series fitting of...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223695/ https://www.ncbi.nlm.nih.gov/pubmed/37241579 http://dx.doi.org/10.3390/mi14050956 |