Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”

Detalles Bibliográficos
Autor principal: Žukauskaitė, Agnė
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Editorial
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223696/
https://www.ncbi.nlm.nih.gov/pubmed/37241690
http://dx.doi.org/10.3390/mi14051067
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author Žukauskaitė, Agnė
author_facet Žukauskaitė, Agnė
author_sort Žukauskaitė, Agnė
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spelling pubmed-102236962023-05-28 Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices” Žukauskaitė, Agnė Micromachines (Basel) Editorial MDPI 2023-05-18 /pmc/articles/PMC10223696/ /pubmed/37241690 http://dx.doi.org/10.3390/mi14051067 Text en © 2023 by the author. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Editorial
Žukauskaitė, Agnė
Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
title Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
title_full Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
title_fullStr Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
title_full_unstemmed Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
title_short Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
title_sort editorial for special issue “piezoelectric aluminium scandium nitride (alscn) thin films: material development and applications in microdevices”
topic Editorial
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223696/
https://www.ncbi.nlm.nih.gov/pubmed/37241690
http://dx.doi.org/10.3390/mi14051067
work_keys_str_mv AT zukauskaiteagne editorialforspecialissuepiezoelectricaluminiumscandiumnitridealscnthinfilmsmaterialdevelopmentandapplicationsinmicrodevices

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