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The Impact of Surface Discontinuities on MEMS Thermal Wind Sensor Accuracy

A 2D calorimetric flow transducer is used to study distortions of the flow velocity field induced by small surface discontinuities around the chip. The transducer is incorporated into a matching recess of a PCB enabling wire-bonded interconnections to the transducer. The chip mount forms one wall of...

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Detalles Bibliográficos
Autores principales:	Talic, Almir, Cerimovic, Samir, Beigelbeck, Roman, Kohl, Franz, Sauter, Thilo, Keplinger, Franz
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223944/ https://www.ncbi.nlm.nih.gov/pubmed/37430489 http://dx.doi.org/10.3390/s23104575

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