Proof-of-Concept Vacuum Microelectronic NOR Gate Fabricated Using Microelectromechanical Systems and Carbon Nanotube Field Emitters

This paper demonstrates a fully integrated vacuum microelectronic NOR logic gate fabricated using microfabricated polysilicon panels oriented perpendicular to the device substrate with integrated carbon nanotube (CNT) field emission cathodes. The vacuum microelectronic NOR logic gate consists of two...

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Detalles Bibliográficos
Autores principales: von Windheim, Tasso, Gilchrist, Kristin H., Parker, Charles B., Hall, Stephen, Carlson, James B., Stokes, David, Baldasaro, Nicholas G., Hess, Charles T., Scheick, Leif, Rax, Bernard, Stoner, Brian, Glass, Jeffrey T., Amsden, Jason J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10223976/
https://www.ncbi.nlm.nih.gov/pubmed/37241597
http://dx.doi.org/10.3390/mi14050973

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