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Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II

Although one of the poster children of high-performance MEMS (Micro Electro Mechanical Systems) gyroscopes, the MEMS hemispherical resonator gyroscope (HRG) is faced with the barrier of technical and process limits, which makes it unable to form a resonator with the best structure. How to obtain the...

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Detalles Bibliográficos
Autores principales: Liu, Jinghao, Li, Pinghua, Zhuang, Xuye, Sheng, Yunlong, Qiao, Qi, Lv, Mingchen, Gao, Zhongfeng, Liao, Jialuo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10224084/
https://www.ncbi.nlm.nih.gov/pubmed/37241677
http://dx.doi.org/10.3390/mi14051054

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