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Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles

In the present paper, we have analytically explored the small variations of the local pressure in the trapped air film of both sides of the clamped circular capacitive micromachined ultrasonic transducer (CMUT), which consists of a thin movable membrane of silicon nitride (Si(3)N(4)). This time-inde...

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Detalles Bibliográficos
Autores principales:	Dastidar, Avik Ghosh, Maity, Reshmi, Tiwari, Ramesh Chandra, Vidojevic, Dejan, Kevkic, Tijana S., Nikolic, Vojkan, Das, Subhajit, Maity, Niladri Pratap
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10224086/ https://www.ncbi.nlm.nih.gov/pubmed/37430577 http://dx.doi.org/10.3390/s23104665

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