Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses

Synthesis of two novel tin carboxylate clusters (RSn)(6)(R′CO(2))(8)O(4)Cl(2) is described, and their structures have been characterized by X-ray diffraction. These clusters have irregular ladder geometry to form very smooth films with small surface roughness (RMS <0.7 nm) over a large domain. EU...

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Detalles Bibliográficos
Autores principales: Wu, Jia-Rong, Lin, Ting-An, Wu, Yan-Ru, Chen, Po-Hsiung, Gau, Tsi-Sheng, Lin, Burn-Jeng, Chiu, Po-Wen, Liu, Rai-Shung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2023
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10228491/
https://www.ncbi.nlm.nih.gov/pubmed/37260503
http://dx.doi.org/10.1039/d3na00131h

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10228491/
https://www.ncbi.nlm.nih.gov/pubmed/37260503
http://dx.doi.org/10.1039/d3na00131h

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