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Mechanically resilient, alumina-reinforced carbon nanotube arrays for in-plane shock absorption in micromechanical devices

Microelectromechanical systems (MEMS) are of considerable interest due to their compact size and low power consumption when used in modern electronics. MEMS devices intrinsically incorporate three-dimensional (3D) microstructures for their intended operations; however, these microstructures are easi...

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Detalles Bibliográficos
Autores principales: Jo, Eunhwan, Lee, Hojoon, Lee, Jae-Ik, Kim, Jongbaeg
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10250468/
https://www.ncbi.nlm.nih.gov/pubmed/37303830
http://dx.doi.org/10.1038/s41378-023-00539-7

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