Enhancing Methane Removal Efficiency of ZrMnFe Alloy by Partial Replacement of Fe with Co

High-purity hydrogen is extensively employed in chemical vapor deposition, and the existence of methane impurity significantly impacts the device performance. Therefore, it is necessary to purify hydrogen to remove methane. The ZrMnFe getter commonly used in the industry reacts with methane at a tem...

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Detalles Bibliográficos
Autores principales: Chen, Shumei, Du, Miao, Li, Shuai, Li, Zhinian, Hao, Lei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10254221/
https://www.ncbi.nlm.nih.gov/pubmed/37298849
http://dx.doi.org/10.3390/molecules28114373

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10254221/
https://www.ncbi.nlm.nih.gov/pubmed/37298849
http://dx.doi.org/10.3390/molecules28114373

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