Achievement of High Perpendicular Anisotropy and Modification of Heat Treatment Peeling in Micron-Thickness Nd-Fe-B Films Used for Magnetic MEMS

Thick Nd-Fe-B permanent magnetic films with good perpendicular anisotropy have important applications in magnetic microelectromechanical systems (MEMSs). However, when the thickness of the Nd-Fe-B film reaches the micron level, the magnetic anisotropy and texture of NdFeB film will become worse, and...

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Detalles Bibliográficos
Autores principales: Huang, Jingbin, Wang, Zhanyong, Liao, Shijie, Wang, Fang, Huang, Min, Zhang, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10254347/
https://www.ncbi.nlm.nih.gov/pubmed/37297205
http://dx.doi.org/10.3390/ma16114071

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