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A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications

Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mech...

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Detalles Bibliográficos
Autores principales:	Chen, Lungtai, Chang, Chinsheng, Chien, Liangju, Lee, Borshiun, Shieh, Wenlo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10255424/ https://www.ncbi.nlm.nih.gov/pubmed/37299814 http://dx.doi.org/10.3390/s23115087

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