A Smart Active Phase-Change Micropump Based on CMOS-MEMS Technology

The rational integration of many microfluidic chips and micropumps remains challenging. Due to the integration of the control system and sensors in active micropumps, they have unique advantages over passive micropumps when integrated into microfluidic chips. An active phase-change micropump based o...

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Detalles Bibliográficos
Autores principales: Jin, Wenzui, Guan, Yimin, Wang, Qiushi, Huang, Peng, Zhou, Qin, Wang, Kun, Liu, Demeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10255987/
https://www.ncbi.nlm.nih.gov/pubmed/37299932
http://dx.doi.org/10.3390/s23115207

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