Engineering Porous Silicon-Based Microcavity for Chemical Sensing

[Image: see text] In this article, the authors theoretically and experimentally investigated ways to improve the efficiency of porous silicon (PS)-based optical microcavity sensors as a 1D/2D host matrix for electronic tongue/nose systems. The transfer matrix method was used to compute reflectance spectra of structures with different [n(L)n(H)] sets of low n(L) and high n(H) bilayer refractive indexes, the cavity position λ(c), and the number of bilayers N(bi). Sensor structures were prepared by electrochemically etching a silicon wafer. The kinetics of adsorption/desorption processes of ethanol–water-based solution was monitored in real time with a reflectivity probe-based setup. It was theoretically and experimentally demonstrated that the sensitivity of the microcavity sensor is higher for structures with refractive indexes in the lower range (and the corresponding porosity values in the upper range). The sensitivity is also improved for structures with the optical cavity mode (λ(c)) adjusted toward longer wavelengths. The sensitivity of a distributed Bragg reflector (DBR) with cavity increases for a structure with cavity position λ(c) in the long wavelength region. The full width at half maximum (fwhm(c)) of the microcavity is smaller and the quality factor of microcavity (Q(c)) is higher for the DBR with a larger number of structure layers N(bi). The experimental results are in good agreement with the simulated data. We believe that our results can help in developing rapid, sensitive, and reversible electronic tongue/nose sensing devices based on a PS host matrix.