High aspect ratio diamond nanosecond laser machining

Laser processing of diamond has become an important technique for fabricating next generation microelectronic and quantum devices. However, the realization of low taper, high aspect ratio structures in diamond remains a challenge. We demonstrate the effects of pulse energy, pulse number and irradiat...

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Detalles Bibliográficos
Autores principales: Golota, Natalie C., Preiss, David, Fredin, Zachary P., Patil, Prashant, Banks, Daniel P., Bahri, Salima, Griffin, Robert G., Gershenfeld, Neil
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Berlin Heidelberg 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10271884/
https://www.ncbi.nlm.nih.gov/pubmed/37333570
http://dx.doi.org/10.1007/s00339-023-06755-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10271884/
https://www.ncbi.nlm.nih.gov/pubmed/37333570
http://dx.doi.org/10.1007/s00339-023-06755-2

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