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Wafer defect recognition method based on multi-scale feature fusion
Wafer defect recognition is an important process of chip manufacturing. As different process flows can lead to different defect types, the correct identification of defect patterns is important for recognizing manufacturing problems and fixing them in good time. To achieve high precision identificat...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Frontiers Media S.A.
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10272367/ https://www.ncbi.nlm.nih.gov/pubmed/37332866 http://dx.doi.org/10.3389/fnins.2023.1202985 |