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High-Q Trampoline Resonators from Strained Crystalline InGaP for Integrated Free-Space Optomechanics
[Image: see text] Nanomechanical resonators realized from tensile-strained materials reach ultralow mechanical dissipation in the kHz to MHz frequency range. Tensile-strained crystalline materials that are compatible with epitaxial growth of heterostructures would thereby at the same time allow real...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10273471/ https://www.ncbi.nlm.nih.gov/pubmed/37234019 http://dx.doi.org/10.1021/acs.nanolett.3c00996 |