CMOS compatible 2T pixel for on-wafer in-situ EUV detection

A novel 2-transistor (2T) pixel EUV detector is proposed and demonstrated by advanced CMOS technology. The proposed 2T detector also exhibits high spectral range (< 267 nm) and spatial resolution (67 μm) with high stability and CMOS Compatibility. The compact 2T EUV detector pixels arranged in a test array are capable of on-wafer recording the 2D EUV flux distribution without any external power. The compact 2T EUV detector pixels arranged in a test array are capable of on-wafer recording the 2D EUV flux distribution without any external power. Through proper initialization process, EUV induced discharging mechanism is fully investigated and an EUV induced electron emission efficiency model is established. Finally, a 2D array for in-situ EUV detection is demonstrated to precisely reflect the pattern projected on the chip/wafer surface.