CMOS compatible 2T pixel for on-wafer in-situ EUV detection

A novel 2-transistor (2T) pixel EUV detector is proposed and demonstrated by advanced CMOS technology. The proposed 2T detector also exhibits high spectral range (< 267 nm) and spatial resolution (67 μm) with high stability and CMOS Compatibility. The compact 2T EUV detector pixels arranged in a...

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Detalles Bibliográficos
Autores principales: Lin, Wei-Hwa, Huang, Han-Lin, Wu, Pin-Jiun, Lin, Chrong-Jung, King, Ya-Chin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2023
Materias:
Research
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10281913/
https://www.ncbi.nlm.nih.gov/pubmed/37382771
http://dx.doi.org/10.1186/s11671-023-03836-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10281913/
https://www.ncbi.nlm.nih.gov/pubmed/37382771
http://dx.doi.org/10.1186/s11671-023-03836-2

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