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Research on Dust Effect for MEMS Thermal Wind Sensors

This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surfa...

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Detalles Bibliográficos
Autores principales: Yi, Zhenxiang, Wang, Yishan, Qin, Ming, Huang, Qingan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10301299/
https://www.ncbi.nlm.nih.gov/pubmed/37420700
http://dx.doi.org/10.3390/s23125533
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author Yi, Zhenxiang
Wang, Yishan
Qin, Ming
Huang, Qingan
author_facet Yi, Zhenxiang
Wang, Yishan
Qin, Ming
Huang, Qingan
author_sort Yi, Zhenxiang
collection PubMed
description This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor’s surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments.
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spelling pubmed-103012992023-06-29 Research on Dust Effect for MEMS Thermal Wind Sensors Yi, Zhenxiang Wang, Yishan Qin, Ming Huang, Qingan Sensors (Basel) Communication This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor’s surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments. MDPI 2023-06-13 /pmc/articles/PMC10301299/ /pubmed/37420700 http://dx.doi.org/10.3390/s23125533 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Communication
Yi, Zhenxiang
Wang, Yishan
Qin, Ming
Huang, Qingan
Research on Dust Effect for MEMS Thermal Wind Sensors
title Research on Dust Effect for MEMS Thermal Wind Sensors
title_full Research on Dust Effect for MEMS Thermal Wind Sensors
title_fullStr Research on Dust Effect for MEMS Thermal Wind Sensors
title_full_unstemmed Research on Dust Effect for MEMS Thermal Wind Sensors
title_short Research on Dust Effect for MEMS Thermal Wind Sensors
title_sort research on dust effect for mems thermal wind sensors
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10301299/
https://www.ncbi.nlm.nih.gov/pubmed/37420700
http://dx.doi.org/10.3390/s23125533
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AT wangyishan researchondusteffectformemsthermalwindsensors
AT qinming researchondusteffectformemsthermalwindsensors
AT huangqingan researchondusteffectformemsthermalwindsensors