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Research on Dust Effect for MEMS Thermal Wind Sensors
This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surfa...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10301299/ https://www.ncbi.nlm.nih.gov/pubmed/37420700 http://dx.doi.org/10.3390/s23125533 |
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author | Yi, Zhenxiang Wang, Yishan Qin, Ming Huang, Qingan |
author_facet | Yi, Zhenxiang Wang, Yishan Qin, Ming Huang, Qingan |
author_sort | Yi, Zhenxiang |
collection | PubMed |
description | This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor’s surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments. |
format | Online Article Text |
id | pubmed-10301299 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-103012992023-06-29 Research on Dust Effect for MEMS Thermal Wind Sensors Yi, Zhenxiang Wang, Yishan Qin, Ming Huang, Qingan Sensors (Basel) Communication This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surface. The finite element method (FEM) simulation was carried out to verify the proposed model using COMSOL Multiphysics software. In experiments, dust was accumulated on the sensor’s surface by two different methods. The measured results indicated that the output voltage for the sensor with dust on its surface was a little smaller than that of the sensor without dust at the same wind speed, which can degrade the measurement sensitivity and accuracy. Compared to the sensor without dust, the average voltage was reduced by about 1.91% and 3.75% when the dustiness was 0.04 g/mL and 0.12 g/mL, respectively. The results can provide a reference for the actual application of thermal wind sensors in harsh environments. MDPI 2023-06-13 /pmc/articles/PMC10301299/ /pubmed/37420700 http://dx.doi.org/10.3390/s23125533 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Communication Yi, Zhenxiang Wang, Yishan Qin, Ming Huang, Qingan Research on Dust Effect for MEMS Thermal Wind Sensors |
title | Research on Dust Effect for MEMS Thermal Wind Sensors |
title_full | Research on Dust Effect for MEMS Thermal Wind Sensors |
title_fullStr | Research on Dust Effect for MEMS Thermal Wind Sensors |
title_full_unstemmed | Research on Dust Effect for MEMS Thermal Wind Sensors |
title_short | Research on Dust Effect for MEMS Thermal Wind Sensors |
title_sort | research on dust effect for mems thermal wind sensors |
topic | Communication |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10301299/ https://www.ncbi.nlm.nih.gov/pubmed/37420700 http://dx.doi.org/10.3390/s23125533 |
work_keys_str_mv | AT yizhenxiang researchondusteffectformemsthermalwindsensors AT wangyishan researchondusteffectformemsthermalwindsensors AT qinming researchondusteffectformemsthermalwindsensors AT huangqingan researchondusteffectformemsthermalwindsensors |