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Research on Dust Effect for MEMS Thermal Wind Sensors

This communication investigated the dust effect on microelectromechanical system (MEMS) thermal wind sensors, with an aim to evaluate performance in practical applications. An equivalent circuit was established to analyze the temperature gradient influenced by dust accumulation on the sensor’s surfa...

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Detalles Bibliográficos
Autores principales:	Yi, Zhenxiang, Wang, Yishan, Qin, Ming, Huang, Qingan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10301299/ https://www.ncbi.nlm.nih.gov/pubmed/37420700 http://dx.doi.org/10.3390/s23125533

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