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Plasma Figure Correction Method Based on Multiple Distributed Material Removal Functions

In the process of plasma figure correction for a quartz sub-mirror, the plasma parallel removal process and ink masking layer are combined for the first time. A universal plasma figure correction method based on multiple distributed material removal functions is demonstrated, and its technological c...

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Detalles Bibliográficos
Autores principales: Wu, Xiang, Fan, Bin, Xin, Qiang, Luo, Qian, Shao, Junming, Gao, Guohan, Jiao, Peiqi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302322/
https://www.ncbi.nlm.nih.gov/pubmed/37374778
http://dx.doi.org/10.3390/mi14061193

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