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A Compact Piezo-Inertia Actuator Utilizing the Double-Rocker Flexure Hinge Mechanism
With a simple structure and control method, the piezo-inertia actuator is a preferred embodiment in the field of microprecision industry. However, most of the previously reported actuators are unable to achieve a high speed, high resolution, and low deviation between positive and reverse velocities...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10302811/ https://www.ncbi.nlm.nih.gov/pubmed/37374702 http://dx.doi.org/10.3390/mi14061117 |