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The Combined Spectral Response of a MEMS Metamaterial Absorber for the Mid-IR and Its Sub-Wavelength Fabrication Residual Array of Holes
Metasurface coatings on a free-standing SiN thin film membrane are fabricated on a Si substrate using masked lithography and CMOS-compatible surface micromachining. The result is a band-limited absorber for the mid-IR, which is part of a microstructure that is attached to the substrate by long and s...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10303743/ https://www.ncbi.nlm.nih.gov/pubmed/37374461 http://dx.doi.org/10.3390/ma16124278 |