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What MEMS Research and Development Can Learn from a Production Environment

The intricate interdependency of device design and fabrication process complicates the development of microelectromechanical systems (MEMS). Commercial pressure has motivated industry to implement various tools and methods to overcome challenges and facilitate volume production. By now, these are on...

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Detalles Bibliográficos
Autores principales:	Niekiel, Malte Florian, Meyer, Jana Marie, Lewitz, Hanna, Kittmann, Anne, Nowak, Marc Alexander, Lofink, Fabian, Meyners, Dirk, Zollondz, Jens-Hendrik
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Perspective
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10304101/ https://www.ncbi.nlm.nih.gov/pubmed/37420715 http://dx.doi.org/10.3390/s23125549

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