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Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions
Indium tin oxide (ITO) has recently gained prominence as a photonic nanomaterial, for example, in modulators, tuneable metasurfaces and for epsilon-near-zero (ENZ) photonics. The optical properties of ITO are typically described by the Drude model and are strongly dependent on the deposition conditi...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10343510/ https://www.ncbi.nlm.nih.gov/pubmed/37446505 http://dx.doi.org/10.3390/nano13131990 |
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author | Blair, Samuel F. J. Male, Joshua S. Cavill, Stuart A. Reardon, Christopher P. Krauss, Thomas F. |
author_facet | Blair, Samuel F. J. Male, Joshua S. Cavill, Stuart A. Reardon, Christopher P. Krauss, Thomas F. |
author_sort | Blair, Samuel F. J. |
collection | PubMed |
description | Indium tin oxide (ITO) has recently gained prominence as a photonic nanomaterial, for example, in modulators, tuneable metasurfaces and for epsilon-near-zero (ENZ) photonics. The optical properties of ITO are typically described by the Drude model and are strongly dependent on the deposition conditions. In the current literature, studies often make several assumptions to connect the optically measured material parameters to the electrical properties of ITO, which are not always clear, nor do they necessarily apply. Here, we present a comprehensive study of the structural, electrical, and optical properties of ITO and showed how they relate to the deposition conditions. We use guided mode resonances to determine the dispersion curves of the deposited material and relate these to structural and electrical measurements to extract all relevant material parameters. We demonstrate how the carrier density, mobility, plasma frequency, electron effective mass, and collision frequency vary as a function of deposition conditions, and that the high-frequency permittivity ([Formula: see text]) can vary significantly from the value of [Formula: see text] = 3.9 that many papers simply assume to be a constant. The depth of analysis we demonstrate allows the findings to be easily extrapolated to the photonic characterisation of other transparent conducting oxides (TCOs), whilst providing a much-needed reference for the research area. |
format | Online Article Text |
id | pubmed-10343510 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-103435102023-07-14 Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions Blair, Samuel F. J. Male, Joshua S. Cavill, Stuart A. Reardon, Christopher P. Krauss, Thomas F. Nanomaterials (Basel) Article Indium tin oxide (ITO) has recently gained prominence as a photonic nanomaterial, for example, in modulators, tuneable metasurfaces and for epsilon-near-zero (ENZ) photonics. The optical properties of ITO are typically described by the Drude model and are strongly dependent on the deposition conditions. In the current literature, studies often make several assumptions to connect the optically measured material parameters to the electrical properties of ITO, which are not always clear, nor do they necessarily apply. Here, we present a comprehensive study of the structural, electrical, and optical properties of ITO and showed how they relate to the deposition conditions. We use guided mode resonances to determine the dispersion curves of the deposited material and relate these to structural and electrical measurements to extract all relevant material parameters. We demonstrate how the carrier density, mobility, plasma frequency, electron effective mass, and collision frequency vary as a function of deposition conditions, and that the high-frequency permittivity ([Formula: see text]) can vary significantly from the value of [Formula: see text] = 3.9 that many papers simply assume to be a constant. The depth of analysis we demonstrate allows the findings to be easily extrapolated to the photonic characterisation of other transparent conducting oxides (TCOs), whilst providing a much-needed reference for the research area. MDPI 2023-06-30 /pmc/articles/PMC10343510/ /pubmed/37446505 http://dx.doi.org/10.3390/nano13131990 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Blair, Samuel F. J. Male, Joshua S. Cavill, Stuart A. Reardon, Christopher P. Krauss, Thomas F. Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions |
title | Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions |
title_full | Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions |
title_fullStr | Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions |
title_full_unstemmed | Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions |
title_short | Photonic Characterisation of Indium Tin Oxide as a Function of Deposition Conditions |
title_sort | photonic characterisation of indium tin oxide as a function of deposition conditions |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10343510/ https://www.ncbi.nlm.nih.gov/pubmed/37446505 http://dx.doi.org/10.3390/nano13131990 |
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