Correlation between the Surface Undulation and Luminescence Characteristics in Semi-Polar [Formula: see text] InGaN/GaN Multi-Quantum Wells

Surface undulation was formed while growing InGaN/GaN multi-quantum wells on a semi-polar m-plane (1–100) sapphire substrate. Two distinct facets, parallel to [Formula: see text] and [Formula: see text] , were formed in the embedded multi-quantum wells (MQWs). The structural and luminescence characteristics of the two facets were investigated using transmission electron microscopy equipped with cathodoluminescence. Those well-defined quantum wells, parallel and slanted to the growth plane, showed distinct differences in indium incorporation from both the X-ray yield and the contrast difference in annular darkfield images. Quantitative measurements of concentration in [Formula: see text] MQWs show an approximately 4 at% higher indium incorporation compared to the corresponding [Formula: see text] when the MQWs were formed under the same growth condition.